aspherical mirror meaning in Chinese

非球面反射镜
非球面镜

In this paper , we brought forward an innovative idea : according to the characteristics of easy deformation of ultra - thin mirror , we employ a sphere mirror , which is easier to fabricate and test , to replace the aspherical mirror , then the sphere mirror is deformed into an aspherical one by active optics technology . on this purpose , we need to study the mechanism and method of shaping a spherical mirror into an aspherical one
由于非球面镜的加工和检测都比较困难,因此本文提出了一个大胆的设想:利用超薄镜易于变形的特点,以加工和检测难度远低于非球面的球面来代替非球面,运用镜面的主动控制技术将球面反射镜变形成所需精度的非球面反射镜。
The projection optics with aspherical mirror of sub - nanometer accuracy are required to get a resolution of less than 0 . 1 m m and wide exposure area simultaneously . the precision of polishing and testing for such ashperical surface is fairly high and it has not been achieved yet in our current state
Euvl微缩投影物镜为了同时实现大的曝光视场和0 . 1 m以下的成像分辨率，微缩投影光学系统需采用面形精度达亚纳米量级的非球面，但我们现阶段的光学加工和检测技术距此要求尚有一定的差距。